Optics and Precision Engineering, Volume. 21, Issue 4, 919(2013)
Nanorobotics and automation
Nanohandling robots have become an enabling technology for analysis and prototyping in the field of nanotechnology and nanomaterials. Nanorobotic pick-and-place operations facilitate the flexible integration of individual nanostructures into existing micro devices increasing their overall performance and sensitivity. The automation of this so-called robotic micro-nano-integration is required to establish the technology not only in research labs, but also in industrial areas. In this paper, basic technologies for the development, integration and automation of nanohandling robots are presented. In addition, special handling strategies for the assembly of different kinds of Atomic Force Microscope(AFM) supertips are discussed.
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FATIKOW Sergej, EICHHORN Volkmar, DIEDERICHS Claas. Nanorobotics and automation[J]. Optics and Precision Engineering, 2013, 21(4): 919
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Received: Feb. 8, 2013
Accepted: --
Published Online: May. 24, 2013
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