Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Infrared and Laser Engineering, Volume. 37, Issue 2, 326(2008)

Application of OES diagnostics on plasma etching

[in Chinese]1、*, [in Chinese]2, [in Chinese]2, [in Chinese]3, [in Chinese]1, [in Chinese]2, and [in Chinese]1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
    • show less
    AbstractGet PDF
    Figures&Tables (0)
    Equations (0)
    References (9)
    Tools
    Paper Information
    Topics

    Keywords
    OES
    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Application of OES diagnostics on plasma etching[J]. Infrared and Laser Engineering, 2008, 37(2): 326

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category:

    Received: Jun. 5, 2007

    Accepted: Jul. 17, 2007

    Published Online: Aug. 17, 2008

    The Author Email: (王巍(1967-)男湖南邵阳人教授博士研究方向为半导体刻)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology