Optics and Precision Engineering, Volume. 18, Issue 8, 1801(2010)
Design of online measuring device for surface profile of Wolter Type I mirror
As traditional interference-based measurements can not be suited to measure the surface profile of the Wolter Type I revolving aspheric mirror, a new method was proposed to measure this kind of mirror in this paper. On the basis of a Long Trace Profiler (LTP), a new measuring device was also established by introducing a pentaprism into the scanning mechanism for ray turning. The working principles, structure parameters and data processing algorithms of the device were investigated, then a standard plane mirror was used as the reference to calibrate the device. Finally, a mirror sample was measured to verify the measuring device. Experimental results indicate that designed device can achieve the slope error of RMS 6.7 μrad , repeatability of 0.75 μrad and the height profiles of PV 0.24λ and RMS 0.07λ, which meets the design requirements basically.
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CUI Tian-gang, WANG Yong-gang, MA Dong-mei, MA Wen-sheng, CHEN Bo. Design of online measuring device for surface profile of Wolter Type I mirror[J]. Optics and Precision Engineering, 2010, 18(8): 1801
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Received: Apr. 1, 2010
Accepted: --
Published Online: Dec. 7, 2010
The Author Email: Tian-gang CUI (foreverctg@163.com)
CSTR:32186.14.