Chinese Optics Letters, Volume. 11, Issue 10, 102601(2013)

Method for in situ calibration of multiple feedback interferometers

Yidong Tan, ZhaoLi Zeng, ShuLian Zhang, Peng Zhang, and Hao Chen

A method is presented for in situ resolution calibration of multiple feedback interferometers (MFIs) using two lasers with different feedback levels simultaneously. The laser with weak optical feedback level generates half-wavelength optical fringes, whereas the laser with strong multiple feedback level generates optical nano-fringes. By using this method, the number of displaced optical nano-fringes can be easily counted, and the resolution of the MFIs can be accurately determined. The integrated MFIs can be used to measure displacements and calibrate other displacement sensors.

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Yidong Tan, ZhaoLi Zeng, ShuLian Zhang, Peng Zhang, Hao Chen. Method for in situ calibration of multiple feedback interferometers[J]. Chinese Optics Letters, 2013, 11(10): 102601

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Received: Jun. 3, 2013

Accepted: Sep. 5, 2013

Published Online: Oct. 8, 2013

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DOI:10.3788/col201311.102601

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