Chinese Journal of Quantum Electronics, Volume. 41, Issue 1, 57(2024)
Research on compensation detection method for high⁃order convex aspheric surface
The high-order convex aspherical mirror is a crucial element in the optical system, and usually used as a secondary mirror to compensate for the off-axis aberration of optical systems, however, its inspection method has always been a major challenge. The back-to-zero detection method is adopted, and a combination of three lenses and a single refractive surface is proposed to compensate for the normal aberration of the high-order aspheric surface. Firstly, the quadratic comparison surface of the high-order aspheric surface is selected to simplify the calculation. Based on the third-order aberration theory, the initial structure of the system is solved, and the normal aberration of the high-order aspheric surface is compensated. After simulation and optimization using ZEMAX software, it is shown that the design results fully meet the requirements. And then, combined with a high-order convex aspheric reflector with an effective clear aperture of 170 mm and a vertex curvature radius of 266.8 mm, the root mean square of the mirror's surface shape accuracy is measured to be 0.019 λ (λ= 632.8 nm), which meets the actual detection requirements and verifies the feasibility of the proposed design method. This method provides a new idea for the inspection of large-diameter high-order convex aspheric surfaces.
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Guangyu CHEN, Mingyong HU, Chuanlong YANG, Zhiwei FENG, Jianfeng XU, Qian BAI, Jinlong CUI. Research on compensation detection method for high⁃order convex aspheric surface[J]. Chinese Journal of Quantum Electronics, 2024, 41(1): 57
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Received: Mar. 12, 2022
Accepted: --
Published Online: Mar. 19, 2024
The Author Email: CHEN Guangyu (18437955919@163.com)