Frontiers of Optoelectronics, Volume. 6, Issue 2, 167(2013)

High precision mode of subaperture stitching for optical surfaces measurement

Huijing ZHANG1, Haobo CHENG1、*, Hon Yuen TAM2, Yongfu WEN1, and Dongmei ZHOU1
Author Affiliations
  • 1School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
  • 2Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Hong Kong, China
  • show less

    Subaperture stitching (SAS) provides us with an attractive way of extending the effective aperture and dynamic range of phase measuring interferometers. Accuracy of stitching algorithm becomes the key factor in the SAS technology. In this paper, the basic principle of SAS was introduced and four modes of SAS were discussed. The stitching experiments were done through the SSI-300 workstation designed and developed independently. There were several comparisons between the four different stitching methods and the measurement of full aperture. The results suggest that the global error averaging mode with reference of subaperture near optic axis is of high precision.

    Tools

    Get Citation

    Copy Citation Text

    Huijing ZHANG, Haobo CHENG, Hon Yuen TAM, Yongfu WEN, Dongmei ZHOU. High precision mode of subaperture stitching for optical surfaces measurement[J]. Frontiers of Optoelectronics, 2013, 6(2): 167

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: RESEARCH ARTICLE

    Received: Dec. 5, 2012

    Accepted: Mar. 4, 2013

    Published Online: Mar. 3, 2014

    The Author Email: CHENG Haobo (chenghaobo@tsinghua.org.cn)

    DOI:10.1007/s12200-013-0306-1

    Topics