Optics and Precision Engineering, Volume. 23, Issue 8, 2258(2015)
Piezoelectric fast steering mirror with large excursion angle
To extend the excursion angle of the Piezoelectric Ceramic Stack Actuator (PCSA) based fast steering mirror (FSM), a piezoelectric FSM with a large excursion angle and a fixed rotation axis was proposed and explored. The output displacement of the PCSA was amplified by a bridge-type flexure hinge and applied to a mirror to generate a fixed axis deflection with the large excursion angle. On this basis, the configuration and the corresponding output equation of the piezoelectric FSM were established, and the characteristics of the FSM, including the maximum excursion angle, the maximum stress, and the natural frequency, were analyzed through theoretical derivation and finite element simulation. Finally, the principle and characteristics of the proposed piezoelectric FSM were validated through experiments and tests. The results show that the output equation of the piezoelectric FSM estimates exactly the mechanical defection angles of the piezoelectric FSM based on the output displacement of the PCSA and improves the design efficiency. Moreover, the developed piezoelectric FSM provides a mechanical excursion angle larger than 3°with natural frequency of 180 Hz, which satisfies the requirements of the high-speed image stabilization system for the large excursion angle and rapid response.
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YUAN Gang, WANG Dai-hua, LI Shi-dong. Piezoelectric fast steering mirror with large excursion angle[J]. Optics and Precision Engineering, 2015, 23(8): 2258
Received: Jan. 17, 2015
Accepted: --
Published Online: Oct. 22, 2015
The Author Email: Gang YUAN (cquyuan@cqu.edu.cn)