Piezoelectrics & Acoustooptics, Volume. 42, Issue 4, 448(2020)
Study on Frequency and Temperature Characteristics of Single Crystal Thin Film Bulk Acoustic Resonators
The 43°Y-cut lithium niobate single crystal piezoelectric thin film was prepared by ion implantation transferring method, and the solid-state acoustic reflective thin film bulk acoustic device was prepared with SiO2/Mo as the acoustic reflection structure. The operating frequency of the resonator is at 3 GHz, and the equivalent electromechanical coupling coefficient of LN film is 14.15%. The frequency and temperature characteristic of the resonator is characterized. The results show that although the frequency temperature coefficient of LN single crystal is between (-70~-90)×10-6/℃, the frequency temperature coefficient of the resonator is reduced to -18×10-6/℃ because the acoustic reflection structure contains a SiO2 layer with positive temperature coefficient, which shows that the solid acoustic reflection structure can effectively suppress the temperature drift of LN single crystal thin film and obtain a resonator with low frequency temperature coefficient.
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JIAN Ke, SHUAI Yao, TIAN Benlang, BAI Xiaoyuan, LUO Wenbo, WU Chuangui, ZHANG Wanli. Study on Frequency and Temperature Characteristics of Single Crystal Thin Film Bulk Acoustic Resonators[J]. Piezoelectrics & Acoustooptics, 2020, 42(4): 448
Received: Dec. 26, 2019
Accepted: --
Published Online: Apr. 21, 2022
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