Opto-Electronic Engineering, Volume. 42, Issue 1, 84(2015)

Design of Silicon Based Germanium Metal-semiconductor-metal Photodetector with Asymmetric Area Electrodes

ZHANG Shiyu*... HONG Xia, FANG Xu and YE Hui |Show fewer author(s)
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    We have proposed a design of silicon based germanium metal-semiconductor-metal (MSM) photodetectors with asymmetric area electrodes based upon its dark current suppression mechanism. The influence of electrode structure on the dark current are simulated using ATLAS software. And the dark current of the samples is reduced to μA scale in experiment. Effective dark current suppression and performance improvement in silicon based germanium MSM photodetectors are then demonstrated.

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    ZHANG Shiyu, HONG Xia, FANG Xu, YE Hui. Design of Silicon Based Germanium Metal-semiconductor-metal Photodetector with Asymmetric Area Electrodes[J]. Opto-Electronic Engineering, 2015, 42(1): 84

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    Paper Information

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    Received: May. 7, 2014

    Accepted: --

    Published Online: Jan. 26, 2015

    The Author Email: Shiyu ZHANG (21330059@zju.edu.cn)

    DOI:10.3969/j.issn.1003-501x.2015.01.014

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