Vibration introduces error to high accuracy surface figure measurement. The vibration error model of the surface figure measurement is established by interferometry. When the vibration amplitude is 63 nm, the sensitive vibration frequency of the surface figure measurement is 12 Hz, and the surface figure root mean square (RMS) error is about 12 nm caused by vibration through using the thirteen-step algorithm. The simulation result and the experimental result are almost the same. According to the experimental analyses, the RMS error of surface figure varies from 1 nm to 7.1 nm, when the vibration frequency is 12 Hz and the amplitude varies from 5 nm to 63 nm, and the surface figure RMS error increases linearly with the vibration amplitude. It can provide a certain reference for the environment control of vibration when measuring high accuracy surface figure through analyzing the surface figure error at different vibration frequencies and amplitudes.