Laser & Optoelectronics Progress, Volume. 59, Issue 3, 0300003(2022)
Research Progress of Laser Micro-Nano Connection Technology
Laser micro-nano connection connection technology is the basis for mass production of micro-nano structures and electronic components, and is a key technology in the field of micro-nano manufacturing. Based on a brief introduction to the application requirements and main technical methods of micro-nano connection technology, this paper focuses on the analysis and discussion of the micro-nano-scale laser connection technology. Firstly, the dimension range of laser connection technology is introduced, and then three typical laser micro-nano connection technologies are selected according to the different process characteristics, namely laser micro welding technology, micro-nano-scale laser soldering technology and laser soldering bumping technology, the research on the processing principles and characteristics, process parameters and application status of the three technology are reviewed, respectively. Through the summary of the research and application status of laser micro-nano connection technology, this paper discusses the important role of laser micro-nano connection technology in the field of aerospace, microelectronic packaging, medical device,etc., and summarizes the development direction and future research work of laser micro-nano connection technology.
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Lili Zhang, Shufeng Sun, Xi Wang, Fengyun Zhang, Pingping Wang, Chengming Cao, Zibin Zhang. Research Progress of Laser Micro-Nano Connection Technology[J]. Laser & Optoelectronics Progress, 2022, 59(3): 0300003
Category: Reviews
Received: Mar. 2, 2021
Accepted: May. 16, 2021
Published Online: Jan. 24, 2022
The Author Email: Sun Shufeng (shufeng2001@163.com)