Acta Optica Sinica, Volume. 15, Issue 7, 917(1995)
Scanning Tunneling Microscope Using a Momolithic Parallel Spring
This paper describes a novel scanning tunnling microscope (STM) system usinga two-dimensional monolithic Paranel spring (MPS) and piczo-electric actuators (PZT)for precision two-dimensional positioning. This leads the interference between the x-axisdisplacement and the y-axis to be very small. The PZT used for controlling the z-axisdisplacement and the sample-to-tip distance is mounted on the monolithic parallel spring.Therefore, the mutual interference to z-axis displacements is negligible.
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[in Chinese], [in Chinese]. Scanning Tunneling Microscope Using a Momolithic Parallel Spring[J]. Acta Optica Sinica, 1995, 15(7): 917