Acta Optica Sinica, Volume. 15, Issue 7, 917(1995)

Scanning Tunneling Microscope Using a Momolithic Parallel Spring

[in Chinese]1 and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    This paper describes a novel scanning tunnling microscope (STM) system usinga two-dimensional monolithic Paranel spring (MPS) and piczo-electric actuators (PZT)for precision two-dimensional positioning. This leads the interference between the x-axisdisplacement and the y-axis to be very small. The PZT used for controlling the z-axisdisplacement and the sample-to-tip distance is mounted on the monolithic parallel spring.Therefore, the mutual interference to z-axis displacements is negligible.

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    [in Chinese], [in Chinese]. Scanning Tunneling Microscope Using a Momolithic Parallel Spring[J]. Acta Optica Sinica, 1995, 15(7): 917

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 10, 1994

    Accepted: --

    Published Online: Aug. 17, 2007

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