A digital inclination angle measurement system with temperature compensation is proposed,and the structure of the system,the principle of temperature compensation and the software design of the system are clarified in details.The system that includes inclinometer,single-chip,A/D converter and temperature sensor has achieved inclination angle measurement of high precision in a wide temperature range and has eliminated the warp brought by temperature.The precision of this system is verified by experimentation.This system has the merits of high stability,high precision and good linearity. In some measurement systems of high precision,this system will be widely used.