Acta Optica Sinica, Volume. 33, Issue 6, 605002(2013)
Design and Fabrication of 16 Channel 200 GHz InP Based Array Waveguide Gratings
A 16-channel InP based array waveguide grating (AWG) with 200 GHz channel spacing is designed and fabricated for monolithic photonic integrated circuits. Polarization independent deep ridge waveguide is applied to reduce chip size and improve the integration level. By using the technologies of metal organic chemical vapor deposition (MOCVD), lithography and induced coupler plasma etching (ICP), the chip is fabricated in our laboratory successfully. The test results show that the insertion loss is about -10 dB, crosstalk is less than -15 dB.
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Zhao Jianyi, Chen Xin, Qian Kun, Zhang Di, Wang Lei, Zhou Ning, Huang Xiaodong, Liu Wen. Design and Fabrication of 16 Channel 200 GHz InP Based Array Waveguide Gratings[J]. Acta Optica Sinica, 2013, 33(6): 605002
Category: Diffraction and Gratings
Received: Dec. 28, 2012
Accepted: --
Published Online: May. 22, 2013
The Author Email: Jianyi Zhao (jianyi.zhao@accelink.com)