Acta Photonica Sinica, Volume. 41, Issue 6, 704(2012)
Optical Properties of Cudoped Ga2O3 Thin Films
Polycrystalline Ga2O3 and Cudoped Ga2O3 thin films are prepared by RF magnetron sputtering and N2 ambient annealing. The Xray diffractometer, UVVIS spectrophotometer, fluorescent spectrometer are used to characterize and analyze the structural and optical properties. The experimental results show that the crystal quality deteriorates, the transmittance decreases, the absorption increases, and the effective optical band gap shrinks for Ga2O3 films with Cu impurity doping. The UV, blue and green characteristic emission bands of intrinsic Ga2O3 films are observed. The UV and blue emission are enhanced by Cudoping and a new emission peak centred at 475 nm appears for the Cudoped Ga2O3 films.
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YAN Jinliang, ZHAO Yinnü. Optical Properties of Cudoped Ga2O3 Thin Films[J]. Acta Photonica Sinica, 2012, 41(6): 704
Received: Sep. 20, 2011
Accepted: --
Published Online: Jun. 19, 2012
The Author Email: Jinliang YAN (yanjinliang@yahoo.cn)