Laser & Optoelectronics Progress, Volume. 60, Issue 1, 0114005(2023)

Wavelength-Controlled Photothermal Microactuator Based on Suspension Printing and its Characterization

Zhiming Tian1,2, Teng Cai1,2, Ruozhou Li1,2、*, Yuming Fang1,2、**, and Ying Yu1,2
Author Affiliations
  • 1College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, Jiangsu , China
  • 2National and Local Joint Engineering Laboratory of RF Integration and Micro-Assembly Technology, Nanjing University of Posts and Telecommunications, Nanjing 210023, Jiangsu , China
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    Photothermal microactuators are extensively utilized in optical microelectromechanical systems and microrobotics. A waveguide-type excitation photothermal U-shaped microactuator, with strong controllability and large displacement, is constructed using the narrow-band wave-absorbing properties of functional dyes, and the temperature and displacement changes in the actuator are simulated in this paper. A narrow-band response photothermal microactuator with a single arm length and radius of 5.8 mm and 200 μm, respectively, is constructed. The experimental findings indicate that the actuator produced using the proposed scheme has the benefits of large displacement response, high energy utilization rate, low production cost, and high integration. Driven using a 100 mW laser, the actuator's free end can attain a displacement of 100-160 μm in the violet (408 nm) or red (638 nm) band, which is much greater than the displacement (20 μm) produced by the beam in the non-corresponding band.

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    Zhiming Tian, Teng Cai, Ruozhou Li, Yuming Fang, Ying Yu. Wavelength-Controlled Photothermal Microactuator Based on Suspension Printing and its Characterization[J]. Laser & Optoelectronics Progress, 2023, 60(1): 0114005

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Nov. 9, 2021

    Accepted: Dec. 13, 2021

    Published Online: Dec. 9, 2022

    The Author Email: Li Ruozhou (lirz@njupt.edu.cn), Fang Yuming (fangym@njupt.edu.cn)

    DOI:10.3788/LOP213182

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