Optics and Precision Engineering, Volume. 28, Issue 10, 2203(2020)
Dual-stage piezo nanopositioner for high-speed ion conductance microscopy imaging
To address motion overshoot and low imaging speed of the hopping mode inconventional scanning ion-conductance microscopy (SICM), this paper proposes a high-speed scanning method based on a dual-stage nanopositioning system. A design scheme consisting of a long-range actuator operating along with a high-speed actuator is proposed, according to the need for the SICM measurement range in the Z direction.The pipet probe can approach the sample surface with a highspeed, without contact. Rhombus-type amplification and guiding mechanism are used as the basic configuration.The key parameters of the dual-stage nanopositioner are determined by an analytical modeling. The static and dynamic characteristics of the dual-stage nanopositioner are evaluated via finite-element analysis. The final prototype is processed and overshoot and imaging experiments are performed. Experimental results show that the designed Z direction nanopositioning stage driven by the dual actuator can significantly improve the probe approach speed to at least 500 nm/ms, which effectively improves the imaging efficiency of the hopping mode, without reducing the imaging stability.
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ZHUANG Jian, WANG Zhi-wu, LIAO Xiao-bo. Dual-stage piezo nanopositioner for high-speed ion conductance microscopy imaging[J]. Optics and Precision Engineering, 2020, 28(10): 2203
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Received: Apr. 23, 2020
Accepted: --
Published Online: Nov. 25, 2020
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