Acta Optica Sinica, Volume. 8, Issue 10, 928(1988)

A submicron lithographic lens available to 1:1 stepper

WANG ZHIJIANG, SUN BAODING, Lu DENGWU, and JIANG JIANZHONG
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    The optical design and model experiment results of a lithographic lens available to 1:1 stepper -with a numerical aperture of 0.4 and field size of 10×10mm2 are degoribed. The optical design is based on Wynne-Dyson s 1:1 oatadioptrio system and some modifications have been made. The experimental results have shown that the lens possesses submicron lithographic resolution.

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    WANG ZHIJIANG, SUN BAODING, Lu DENGWU, JIANG JIANZHONG. A submicron lithographic lens available to 1:1 stepper[J]. Acta Optica Sinica, 1988, 8(10): 928

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 28, 1987

    Accepted: --

    Published Online: Sep. 16, 2011

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