Acta Optica Sinica, Volume. 8, Issue 10, 928(1988)
A submicron lithographic lens available to 1:1 stepper
The optical design and model experiment results of a lithographic lens available to 1:1 stepper -with a numerical aperture of 0.4 and field size of 10×10mm2 are degoribed. The optical design is based on Wynne-Dyson s 1:1 oatadioptrio system and some modifications have been made. The experimental results have shown that the lens possesses submicron lithographic resolution.
Get Citation
Copy Citation Text
WANG ZHIJIANG, SUN BAODING, Lu DENGWU, JIANG JIANZHONG. A submicron lithographic lens available to 1:1 stepper[J]. Acta Optica Sinica, 1988, 8(10): 928