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Optics and Precision Engineering, Volume. 15, Issue 10, 1596(2007)

Modeling method of micro-displacement stage driven by piezoelectric ceramic

[in Chinese]1 and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    [in Chinese], [in Chinese]. Modeling method of micro-displacement stage driven by piezoelectric ceramic[J]. Optics and Precision Engineering, 2007, 15(10): 1596

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    Received: Jul. 26, 2007

    Accepted: --

    Published Online: Feb. 18, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology