Acta Optica Sinica, Volume. 36, Issue 10, 1012005(2016)

Phase Analysis in Computer-Generated Hologram Induced by Direct Laser Writing Systems with Orthogonality Error

Zheng Ligong1、*, Hao Teng1,2, Guo Chengli1,2, Wang Ruoqiu1,2, and Zhang Zhiyu1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less

    Computer-generated hologram (CGH) plays an important role in testing high-accuracy optical elements such as aspheric and freeform surfaces. However, the orthogonality error induced by the rails of direct laser writing systems will deteriorate the fabrication accuracy of CGH, and thus introduce astigmatism error to the testing results of surface shape. To quantitatively study the influence of orthogonality error induced by the rails of direct laser writing systems on testing results of CGH, a model of rails′ angle error of direct laser writing systems using scalar diffraction theory is established, and the impact of orthogonality error on the alignment section of the CGH is analyzed. The experimental results indicate that there is 2.26%, 2.33% and 1.72% deviation in root mean square(RMS), peak valley(PV) and Zernike astigmatic coefficient respectively with theoretical results when orthogonality error is 800 μrad, which verifies the correctness of the established error model.

    Tools

    Get Citation

    Copy Citation Text

    Zheng Ligong, Hao Teng, Guo Chengli, Wang Ruoqiu, Zhang Zhiyu. Phase Analysis in Computer-Generated Hologram Induced by Direct Laser Writing Systems with Orthogonality Error[J]. Acta Optica Sinica, 2016, 36(10): 1012005

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: May. 19, 2016

    Accepted: --

    Published Online: Oct. 12, 2016

    The Author Email: Ligong Zheng (zhenglg@ciomp.ac.cn)

    DOI:10.3788/aos201636.1012005

    Topics