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Acta Optica Sinica, Volume. 14, Issue 4, 447(1994)

Primary Study of Deep-Etch Synchrotron Radiation Lithography

[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    diameter is about 38～39 μmthe height is about 25 μm.the length of foliag is 8 μm and windth 2.8 μmThe LIGA technology is based on a combination of d
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Primary Study of Deep-Etch Synchrotron Radiation Lithography[J]. Acta Optica Sinica, 1994, 14(4): 447

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    Paper Information

    Category: Rapid communications

    Received: Nov. 10, 1993

    Accepted: --

    Published Online: Aug. 17, 2007

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology