Acta Optica Sinica, Volume. 29, Issue 4, 853(2009)
Design of MEMS Deformable Micro-Mirror for Compensating Thermally Induced Aberration of Laser Diode-Pumped Solid-State Laser
The drive mode of MEMS deformable micro-mirror is initially selected. Based on theoretical analysis of optics and mechanics characteristics of MEMS deformable micro-mirror, the relation between correlation structure parameter and performance of deformable mirror is obtained according to the requirements which compensate thermally induced aberration of laser diode. Pumped solid-state laser, a novel electrostatic actuated deformable micro-mirror with continuous facet is designed. It is used to set up a closed-loop control adaptive optics system, which has compensated thermally induced aberration of laser beam. The experimental result shows the intra-cavity aberration was effectively compensated and the output power and beam quality were improved by the novel MEMS deformable micro-mirror.
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Tan Zuojun, Chen Haiqing, Kang Jingran, Zhang Kun. Design of MEMS Deformable Micro-Mirror for Compensating Thermally Induced Aberration of Laser Diode-Pumped Solid-State Laser[J]. Acta Optica Sinica, 2009, 29(4): 853