Optoelectronic Technology, Volume. 40, Issue 1, 13(2020)

Hybrid Integration of InP FP Laser / Silicon Optical Waveguide Based on Silicon Edge Coupler

Yan WANG1,2, Dongchen WANG2, Pengxiao XU2, Guanghua TANG2, Guoqing YOU2, and Yuechan KONG1,2
Author Affiliations
  • 1Science and Technology on Monolithic Integrated Circuits and Modules Laboratory, Nanjing 210016, CHN
  • 2The 55th Research Institute of China Electronic Technology Group Corporation, Nanjing 210016, CHN
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    To solve the problem of practical light source lacking in silicon photonic integrated circuit, design and preparation method of integrated module including 1.55 μm InP FP laser chip, InP PIN photodetector chip and silicon optical waveguide was proposed. Silicon edge coupler of inverted cone type was fabricated by CMOS compatible process, and the coupling efficiency was 36.7 %. The laser chip and silicon waveguide chip were coupled by micro-assembly alignment technology, and the coupling efficiency was 35.8 % after UV adhesive curing. The 1 dB alignment tolerance was 1.2 μm horizontally and 0.95 μm longitudinally.

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    Yan WANG, Dongchen WANG, Pengxiao XU, Guanghua TANG, Guoqing YOU, Yuechan KONG. Hybrid Integration of InP FP Laser / Silicon Optical Waveguide Based on Silicon Edge Coupler[J]. Optoelectronic Technology, 2020, 40(1): 13

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    Paper Information

    Category: Research and Trial-manufacture

    Received: Dec. 28, 2019

    Accepted: --

    Published Online: Apr. 26, 2020

    The Author Email:

    DOI:10.19453/j.cnki.1005-488x.2020.01.003

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