Optoelectronic Technology, Volume. 40, Issue 1, 13(2020)
Hybrid Integration of InP FP Laser / Silicon Optical Waveguide Based on Silicon Edge Coupler
To solve the problem of practical light source lacking in silicon photonic integrated circuit, design and preparation method of integrated module including 1.55 μm InP FP laser chip, InP PIN photodetector chip and silicon optical waveguide was proposed. Silicon edge coupler of inverted cone type was fabricated by CMOS compatible process, and the coupling efficiency was 36.7 %. The laser chip and silicon waveguide chip were coupled by micro-assembly alignment technology, and the coupling efficiency was 35.8 % after UV adhesive curing. The 1 dB alignment tolerance was 1.2 μm horizontally and 0.95 μm longitudinally.
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Yan WANG, Dongchen WANG, Pengxiao XU, Guanghua TANG, Guoqing YOU, Yuechan KONG. Hybrid Integration of InP FP Laser / Silicon Optical Waveguide Based on Silicon Edge Coupler[J]. Optoelectronic Technology, 2020, 40(1): 13
Category: Research and Trial-manufacture
Received: Dec. 28, 2019
Accepted: --
Published Online: Apr. 26, 2020
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