In order to study the thermo-optic effect of the optical microsphere cavity, two kinds of pump sources, 1 550 nm band tunable laser and broadband light source, were used to measure the change of the resonance peak wavelength of silica, tellurite glass microsphere and rare earth ion doped microsphere when the excitation light power and environment temperature change. The excitation power sensitivity of the silica microspheres was 32.4 pm/mW and the temperature sensitivity was 13.4 pm/℃. For the thulium ions doped silica microsphere, the sensitivity of excitation power was 48.7 pm/mw and the sensitivity of the environment temperature was 15.2 pm/℃. The excitation power sensitivity of the tellurite microsphere was 71.1 pm/mw, and the temperature sensitivity was 0.019 1 nm/℃, which was nearly one times higher than that of the FBG temperature sensor (10 pm/℃). If the rare earth ions were doped, the sensitivity was 1.1 times higher. The results have reference significance for the microcavity applications of the temperature sensor.