Laser & Optoelectronics Progress, Volume. 53, Issue 9, 91203(2016)
Non-Contact Optical Component Curvature Radius Detection System Based on Laser Scanning
In this paper, a non-contact optical component curvature radius detection system based on laser scanning method is introduced. With this method, the automation degree of the curvature radius detection after rough grinding of the optical elements is greatly improved, and the software-hardware combined one-click surface shape data are obtained as well. This system uses x/y-axis two-dimensional translation stage motion for grid scanning. Meanwhile, it measures surface shape camber based on laser scanning method and adds z axis lifting platform to increase the camber measurement range. Computer control program and the human-computer interaction interface are designed to make the system more flexible and convenient at later stage. The surface fitting algorithm is written, and the automatic acquisition and fitting of the optical surface shape data as well as the calculation of the relevant optical parameters are realized ultimately, then the detection of a variety of non-contact optical component surface shapes can be completed. Experiment results show that the system can get the required surface shape data whether the surface gap of optical components under test is beyond the measuring range of the laser head or not. After error processing, the measurement accuracy meets the testing requirements of rough grinding and is better than ±0.15 %.
Get Citation
Copy Citation Text
Qin Ying, Xu Jun. Non-Contact Optical Component Curvature Radius Detection System Based on Laser Scanning[J]. Laser & Optoelectronics Progress, 2016, 53(9): 91203
Category: Instrumentation, Measurement and Metrology
Received: Apr. 11, 2016
Accepted: --
Published Online: Sep. 14, 2016
The Author Email: Ying Qin (qinying@ynao.ac.cn)