Optoelectronics Letters, Volume. 15, Issue 3, 190(2019)

Fabrication of sapphire rib waveguides using a femtosecond laser

Jue WANG1... Qing TAO1,2, Chen HU1, Zhong-sheng ZHAI1,2, Jian CHENG1 and Dun LIU1,* |Show fewer author(s)
Author Affiliations
  • 1School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China
  • 2Hubei Key Laboratory of Modern Manufacturing Quantity Engineering, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China1
  • show less

    We demonstrate a method for fabricating sapphire rib waveguides with femtosecond laser micromachining technology. Finite difference beam propagation method (FD-BPM) is applied to design sapphire rib waveguides. We explore the process of etching on a sapphire substrate surface via direct laser ablation. Rib waveguides that satisfies the dimensions of our design were fabricated. Actual light propagation performance is tested, and with the cut-back method, the insertion loss of 2.9±0.5 dB/cm is measured.

    Tools

    Get Citation

    Copy Citation Text

    WANG Jue, TAO Qing, HU Chen, ZHAI Zhong-sheng, CHENG Jian, LIU Dun. Fabrication of sapphire rib waveguides using a femtosecond laser[J]. Optoelectronics Letters, 2019, 15(3): 190

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Nov. 21, 2019

    Accepted: --

    Published Online: Jan. 7, 2020

    The Author Email: Dun LIU (dun.liu@hbut.edu.cn)

    DOI:10.1007/s11801-019-8180-8

    Topics