Optoelectronics Letters, Volume. 15, Issue 3, 190(2019)
Fabrication of sapphire rib waveguides using a femtosecond laser
We demonstrate a method for fabricating sapphire rib waveguides with femtosecond laser micromachining technology. Finite difference beam propagation method (FD-BPM) is applied to design sapphire rib waveguides. We explore the process of etching on a sapphire substrate surface via direct laser ablation. Rib waveguides that satisfies the dimensions of our design were fabricated. Actual light propagation performance is tested, and with the cut-back method, the insertion loss of 2.9±0.5 dB/cm is measured.
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WANG Jue, TAO Qing, HU Chen, ZHAI Zhong-sheng, CHENG Jian, LIU Dun. Fabrication of sapphire rib waveguides using a femtosecond laser[J]. Optoelectronics Letters, 2019, 15(3): 190
Received: Nov. 21, 2019
Accepted: --
Published Online: Jan. 7, 2020
The Author Email: Dun LIU (dun.liu@hbut.edu.cn)