Chinese Optics Letters, Volume. 12, Issue s1, S12402(2014)

Influence of electrolyte temperature onspectral properties of porous silicon microcavity

Hongyan Zhang, Rongxia Liu, Xiaoyi Lü, and Zhenhong Jia

A porous silicon microcavity (PSM) is highly sensitive for sensing applications due to its high surface area and a narrow resonance peak. In this letter, we fabricated the PSM by alternate current density from a low value to a high value during double-tank electrochemical anodization at different electrolyte temperatures. Results show that with the increase of the electrolyte temperature, the rate of the PS etching becomes faster and the refractive index of the PS layer becomes smaller. The thickness of the PS increases faster than the decrease of the refractive index of the PS.

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Hongyan Zhang, Rongxia Liu, Xiaoyi Lü, Zhenhong Jia. Influence of electrolyte temperature onspectral properties of porous silicon microcavity[J]. Chinese Optics Letters, 2014, 12(s1): S12402

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Paper Information

Category: Optics at Surfaces

Received: Sep. 27, 2013

Accepted: Oct. 18, 2013

Published Online: Jul. 31, 2014

The Author Email:

DOI:10.3788/col201412.s12402

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