Acta Optica Sinica, Volume. 42, Issue 9, 0912001(2022)
White Light Interferometry Stitching Measurement of Gull-Wing Aspheric Optics
In order to solve the problem of gull-wing aspheric profile detection, a white light interferometry stitching measurement scheme is proposed. The scanning path is planned by combining white light micro-interferometry with the measurement principle of subaperture stitching. The white light interferometry stitching measurement platform is constructed, and the high-precision measurement of 59 subapertures of a 10 mm gull-wing aspheric surface is completed. The measured subaperture data are stitched by using the synchronous subaperture stitching algorithm, and the full-aperture profile error is obtained. The comparative experiments on the detection of gull-wing aspheric surface by using high-precision profiler and computer generated hologram (CGH) compensator are carried out. The results show that the profile error and distribution of the proposed detection scheme are consistent with those obtained by high-precision profiler and CGH compensator, which effectively verifies the correctness of the proposed measurement scheme.
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Wenwen Lu, Jingyang Guo, Shanyong Chen. White Light Interferometry Stitching Measurement of Gull-Wing Aspheric Optics[J]. Acta Optica Sinica, 2022, 42(9): 0912001
Category: Instrumentation, Measurement and Metrology
Received: Sep. 30, 2021
Accepted: Nov. 17, 2021
Published Online: May. 6, 2022
The Author Email: Chen Shanyong (mesychen@163.com)