Acta Optica Sinica, Volume. 42, Issue 9, 0912001(2022)

White Light Interferometry Stitching Measurement of Gull-Wing Aspheric Optics

Wenwen Lu1,2, Jingyang Guo1,2, and Shanyong Chen1,2、*
Author Affiliations
  • 1Laboratory of Science and Technology on Integrated Logistics Support, College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, Hunan, China
  • 2Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, Hunan, China
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    In order to solve the problem of gull-wing aspheric profile detection, a white light interferometry stitching measurement scheme is proposed. The scanning path is planned by combining white light micro-interferometry with the measurement principle of subaperture stitching. The white light interferometry stitching measurement platform is constructed, and the high-precision measurement of 59 subapertures of a 10 mm gull-wing aspheric surface is completed. The measured subaperture data are stitched by using the synchronous subaperture stitching algorithm, and the full-aperture profile error is obtained. The comparative experiments on the detection of gull-wing aspheric surface by using high-precision profiler and computer generated hologram (CGH) compensator are carried out. The results show that the profile error and distribution of the proposed detection scheme are consistent with those obtained by high-precision profiler and CGH compensator, which effectively verifies the correctness of the proposed measurement scheme.

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    Wenwen Lu, Jingyang Guo, Shanyong Chen. White Light Interferometry Stitching Measurement of Gull-Wing Aspheric Optics[J]. Acta Optica Sinica, 2022, 42(9): 0912001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Sep. 30, 2021

    Accepted: Nov. 17, 2021

    Published Online: May. 6, 2022

    The Author Email: Chen Shanyong (mesychen@163.com)

    DOI:10.3788/AOS202242.0912001

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