Acta Optica Sinica, Volume. 20, Issue 12, 1675(2000)
X-Ray Inteferometry for Pitch Nanometer Measurement of SPM Master
X-ray interferometer, which takes silicon lattice spacing as length unit, can realize subnanometer displacement measurement. A scheme of pitch measurement of scanning probe microscope (SPM) master is presented by using silicon lattice scale and combining X-ray interferometer and scanning tunneling microscope (STM). The experimental results proved its feasibility.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. X-Ray Inteferometry for Pitch Nanometer Measurement of SPM Master[J]. Acta Optica Sinica, 2000, 20(12): 1675
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