Laser & Optoelectronics Progress, Volume. 57, Issue 23, 231604(2020)

Design and Analysis of a Heterojunction AlGaAs/GaAs PIN Diode Structure

Li Liu1,2, Caiyan Li1, Qilian Zhang1, Xiaowei Sun1, and Hao Sun1、*
Author Affiliations
  • 1Key Laboratory of Terahertz Solid-State Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    Herein, a heterojunction AlGaAs/GaAs PIN diode material structure for a millimeter wave switch and limiter applications is designed, and the two main factors (i.e., the Al doping concentration and I-layer thickness) that influence the performance of the diode are analyzed and optimized. Furthermore, the verification device is fabricated via molecular beam epitaxy and semiconductor process flow sheet technique. We test the device, and the test results show that the opening voltage of the PIN diode is 1.06 V, and the breakdown voltage is 26. The insertion loss of the diode is approximately 1 dB and the isolation degree is 12 dB (when the frequency is 30 GHz), both of which are observed in the frequency range of 1-40 GHz. Thus, the designed device is suitable for millimeter wave switch and limiter circuits.

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    Li Liu, Caiyan Li, Qilian Zhang, Xiaowei Sun, Hao Sun. Design and Analysis of a Heterojunction AlGaAs/GaAs PIN Diode Structure[J]. Laser & Optoelectronics Progress, 2020, 57(23): 231604

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    Paper Information

    Category: Materials

    Received: Feb. 13, 2020

    Accepted: May. 25, 2020

    Published Online: Dec. 8, 2020

    The Author Email: Sun Hao (sh@mail.sim.ac.cn)

    DOI:10.3788/LOP57.231604

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