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Acta Optica Sinica, Volume. 14, Issue 6, 642(1994)

Development and Optical Performance of Soft X-ray Multilayer Phase Laminar Grating

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]2, [in Chinese]2, and [in Chinese]3
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    The developement and characterization of soft X-ray multilayer phase laminargrating are given detailly. The optical performance was measured at Beijing SynchrotronRadiation Facility, the results are discussed and analysised.

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    multilayeroptical performancesoft X-ray phase grating
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Development and Optical Performance of Soft X-ray Multilayer Phase Laminar Grating[J]. Acta Optica Sinica, 1994, 14(6): 642

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    Paper Information

    Category: Thin Films

    Received: Feb. 1, 1994

    Accepted: --

    Published Online: Aug. 17, 2007

    The Author Email:

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology