Acta Optica Sinica, Volume. 18, Issue 6, 757(1998)

A Confocal Method for Measuring Whole-Field Three-Dimentional Surface Topography

[in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    A confocal method for measuring whole—field 3-D surface topography,which employs a micro—optic component to realize parallel measuring and reco rding is proposed. An array of point light sources produced by the micro-optic compo nent is used to detect one of the confocal plane series simultaneously. And as an alternative to a pinhole diaphragm, the pixels on the CCD plane directly capture and register the 3-D information intensities from the detected planes. The principle and the depth response relation of the method are discussed, and the primary experimental results and a 3-D reconstructed image ape given.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A Confocal Method for Measuring Whole-Field Three-Dimentional Surface Topography[J]. Acta Optica Sinica, 1998, 18(6): 757

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 5, 1997

    Accepted: --

    Published Online: Oct. 18, 2006

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