Under different sputtering powers, the ZnO∶W film layers are deposited for 55 min by the radio frequency magnetron sputtering method, and then are hydrotreated for 8 minutes by maintaining the stability of sputtering parameters and adding hydrogen with a volume fraction of 5%. The ZnO∶W transparent conductive films with surface-textured structures are obtained. The micro-morphology, structure and surface-texturing degree of samples are tested and analyzed. The results indicate that, the surface-texturing degree of the ZnO∶W samples after hydrogenation for 8 min at the sputtering power of 200 W reaches 92.82, meanwhile, their electro-conductivity is superior whose average electrical resistivity is 3.93×10 -3 Ω·cm. It is hopeful for this surface textured structure to further improve the conversion efficiency of the ZnO transparent conductive electrode cells.