Acta Optica Sinica, Volume. 19, Issue 11, 1518(1999)
Nonlinear Excess Fraction Method and its Applications to Profilometry
The difficulty in phase unwrapping is the key problem that compromises reliability and prevents automatic measurement in grating projection profilometry. A novel temporal phase unwrapping algorithmnon-linear excess fraction method (NLEFM) is proposed, which may extend the reliable measuring range by a factor of dozens without losing accuracy. The principle of NLEFM is detailed and experimental results are given in which complex profiles are reliably computed using this algorithm
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[in Chinese], [in Chinese], [in Chinese]. Nonlinear Excess Fraction Method and its Applications to Profilometry[J]. Acta Optica Sinica, 1999, 19(11): 1518