Acta Optica Sinica, Volume. 19, Issue 11, 1518(1999)

Nonlinear Excess Fraction Method and its Applications to Profilometry

[in Chinese], [in Chinese], and [in Chinese]
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    The difficulty in phase unwrapping is the key problem that compromises reliability and prevents automatic measurement in grating projection profilometry. A novel temporal phase unwrapping algorithmnon-linear excess fraction method (NLEFM) is proposed, which may extend the reliable measuring range by a factor of dozens without losing accuracy. The principle of NLEFM is detailed and experimental results are given in which complex profiles are reliably computed using this algorithm

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    [in Chinese], [in Chinese], [in Chinese]. Nonlinear Excess Fraction Method and its Applications to Profilometry[J]. Acta Optica Sinica, 1999, 19(11): 1518

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 21, 1998

    Accepted: --

    Published Online: Aug. 9, 2006

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