Laser & Optoelectronics Progress, Volume. 57, Issue 7, 072203(2020)
Research on Compensation Testing Method for Large-Aperture and High-Order Aspheric Surface
One of the difficult problems in optical manufacturing is to process and test large aperture and high-order aspheric surface. The spherical aberration coefficient of a high-order aspheric concave mirror with an effective aperture of 900 mm and a radius of curvature of 2580 mm was derived. Based on third-order aberration theory, the normal aberration of the high-order aspheric surface was compensated, and the initial structure of the compensation system was solved. Compensation systems based on spherical wave and plane wave were designed respectively, and the high-order aspheric concave mirrors were polished. The accuracy of the surface shape measured by four-dimensional interferometer is 0.022λ which meets the actual measurement requirements.
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Chuchu Zhao, Mingyong Hu, Shaowei Zhang, Xinglong Li, Zhaoyang Li. Research on Compensation Testing Method for Large-Aperture and High-Order Aspheric Surface[J]. Laser & Optoelectronics Progress, 2020, 57(7): 072203
Category: Optical Design and Fabrication
Received: Oct. 28, 2019
Accepted: Nov. 14, 2019
Published Online: Mar. 31, 2020
The Author Email: Zhao Chuchu (315356133@qq.com), Hu Mingyong (humy8@126.com)