Acta Optica Sinica, Volume. 34, Issue 10, 1012003(2014)
Research on Angle Measure Error Based on Method of Angle Difference
According to device of angle difference measurement, analyze how the error of angle measurement affect the topography measurement, while using relatively goniometry to measure the direction of sampling′s normal. Using Matlab software to set up the error transmission model, then analyze the regulation of how stability of angle measurement influence the topography measurement. The experimental result demonstrates this analysis method is reliable.
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Chen Haiping, Li Jiabin, Liu Changchun, Xiong Zhao, Zhou Hai, Yuan Xiaodong, Zheng Wanguo. Research on Angle Measure Error Based on Method of Angle Difference[J]. Acta Optica Sinica, 2014, 34(10): 1012003
Category: Instrumentation, Measurement and Metrology
Received: Jun. 3, 2014
Accepted: --
Published Online: Sep. 9, 2014
The Author Email: Haiping Chen (chping5705@163.com)