Chinese Journal of Lasers, Volume. 39, Issue s2, 209011(2012)

Study of Computer Simulation on Chiral Spiral Structure Based on Multi-Beam Interference Lithography

Niu Dongjie1,2、*, Lü Hao1, Zhang Qingyue1,2, Zhao Qiuling1, and Wang Xia1
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  • 1[in Chinese]
  • 2[in Chinese]
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    Based on multi-beam interference theory, the chiral spiral structure by interference lithography is simulated, and several factors that can influence the structures are discussed. The simulation results indicate that there are different special effects of incident angle, polarization status, polarization direction and phase difference on the three-dimensional spiral structures. The computer simulation of photonic crystal provides an effective guidance for the experimental fabrication, and promotes the development and applications of chiral spiral structures.

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    Niu Dongjie, Lü Hao, Zhang Qingyue, Zhao Qiuling, Wang Xia. Study of Computer Simulation on Chiral Spiral Structure Based on Multi-Beam Interference Lithography[J]. Chinese Journal of Lasers, 2012, 39(s2): 209011

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    Paper Information

    Category: holography and information processing

    Received: Sep. 4, 2012

    Accepted: --

    Published Online: Jan. 5, 2013

    The Author Email: Dongjie Niu (ndjjie@126.com)

    DOI:10.3788/cjl201239.s209011

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