The laser-induced damage of several kinds of dielectric thin-film materials in λ/2 thin-films forms, AR and HR coatings has been studied. The damage threshold has been measured by the 1064 nm laser with single shot and 10 Hz pulse multishot respectively. The data and damage morphologies are discussed in details and some conclusion are drawn concerning pulsed laser-induced damage of the coatings:a) optical materials Er₂O₃,Y₂O₃,Gd₂O₃etc. have high damage threshold with 1064 nm laser at single shot and multishot, specially to 10 Hz laser irradiation, the damage size is smaller than other materials.b) the λ/2 layer SiO₂of AR and HR coating has no influence on the onset threshold, but can obviously drop the possibility and level of the damage.