Piezoelectrics & Acoustooptics, Volume. 42, Issue 1, 97(2020)

Study on Ultrasonic Planar Motor Driven by Dual-H-shaped Stator

HE Honglin1、*, DENG Chuantao1, LONG Yufan1, HU Chongrui1, and LENG Xinlong2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    To meet the demands of high precision planar motion drive in the application fields, a novel planar motor driven by dual-H-shaped stator and its dynamic structure were presented. The out-of-plane symmetrical bending vibration, the in-plane bending vibration of the left and right bars, the in-plane bending vibration of the upper and lower bars of the stator were selected as the working modes. Through the resonance coupling with the out-of-plane bending vibration mode and the in-plane bending vibration modes of the upper and lower bars, two elliptical trajectories processing along xz and yz planes were compounded on the driving feet of the upper and lower bars and the left and right bars of the stator respectively to drive the slider along the x-and y-direction motion. A finite element model of the stator was established, so that the working modes of the stator were calculated, and the existence of expected working modes was verified. By calculating the frequency consistency of the stator, the main dimension of 30 mm×8.7 mm×7.4 mm was determined. Based on the harmonic response analysis, the stator’s disturbance mode characteristics were calculated so that the separation of the disturbance mode was implemented. The elliptical trajectories of the feet moving along xz and yz planes were simulated, and the feet vibration amplitudes along x (or y)-and z-direction under 250 V voltage excitation were 1.5 μm and 1.3 μm respectively. The operating principle of the motor was verified, and the vibration regulation characteristics of the feet under the voltage regulation, frequency regulation and the phase modulation were investigated. A fixed scheme for the stator was determined, and the assembly structure of motor is designed. The motor has good dynamic characteristics and application prospects.

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    HE Honglin, DENG Chuantao, LONG Yufan, HU Chongrui, LENG Xinlong. Study on Ultrasonic Planar Motor Driven by Dual-H-shaped Stator[J]. Piezoelectrics & Acoustooptics, 2020, 42(1): 97

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    Paper Information

    Received: May. 14, 2019

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email: Honglin HE (Hehonglin1967@163.com)

    DOI:10-11977/j.issn.1004-2474.2020-01-022

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