Spectroscopy and Spectral Analysis, Volume. 30, Issue 3, 846(2010)

A Novel Near-Infrared Spectra Detection System Based on MEMS Grating

WEI Wei*, HUANG Shang-lian, CHEN Wei-min, WANG Ning, ZHANG Jie, and ZHU Yong
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    A novel near-infrared spectrum detection system based on grating lightmodulators is proposed in the present paper. A new spectrum detection method thatcombines MEMS grating light modulators with a single near infrared detector isapplied in the system, which can avoid using costly near infrared detector array.Firstly, the optical structure of the spectra detection system was designed.Secondly, the spectra detection principle of this system was addressed in detailthat with a series of voltages actuated on the grating light modulators array,the optical energy of each wavelength is reflected onto the single near-infrareddetector by corresponding grating light modulator pixel orderly and thetransmission spectra can be acquired after a scanning period. Finally, thegrating light modulators array device was fabricated by surface micromachiningprocessing and a near-infrared spectra detection system was set up to test thekey parameters such as resolving power, wavelength accuracy, system stability andresponse characteristics of grating light modulators. The experimental resultsilluminated that the spectrum range of this spectra detection system is from 1320 to 1 400 nm, the resolving power is below 10nm, the wavelength accuracy iswithin 1nm,the stability of the system is below 0.5% and the response frequencyis 5 kHz. The results of theory analysis and experiments demonstrated thefeasibility of the spectra detection system. It could give theoretical andexperimental guidance to the design and fabrication of miniature near-infraredspectrometer based on grating light modulators.MEMS

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    WEI Wei, HUANG Shang-lian, CHEN Wei-min, WANG Ning, ZHANG Jie, ZHU Yong. A Novel Near-Infrared Spectra Detection System Based on MEMS Grating[J]. Spectroscopy and Spectral Analysis, 2010, 30(3): 846

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    Paper Information

    Received: Mar. 12, 2009

    Accepted: --

    Published Online: Jul. 23, 2010

    The Author Email: Wei WEI (cqwei2000@hotmail.com)

    DOI:

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