Acta Optica Sinica, Volume. 35, Issue s1, 122005(2015)
Grinding 2 m Diameters Aspheric SiC Mirror with Multi-Mode Optimization Technique
Use multi-mode optimization technique to improve material remove efficiency and precision. Introduced principal theory and mathematical model of multi-mode optimization technique. Compared with traditional computer controlled optical surfacing (CCOS) technique, we introduce the advantage of multi-mode technique. In the last, we grind a SiC mirror using multi-mode technique. Take SiC mirror with caliber of 2040 mm as an example to introduce how the multi-mode technique applied in grind large aspheric SiC mirror. After a complete multi-mode process, peak valley (PV) of the surface converges from 8.72 μm to 4.91 μm and root mean square (RMS) of the surface converges from 0.91 μm to 0.52 μm, which demonstrates the validity of the multi-mode technique.
Get Citation
Copy Citation Text
Liu Zhenyu. Grinding 2 m Diameters Aspheric SiC Mirror with Multi-Mode Optimization Technique[J]. Acta Optica Sinica, 2015, 35(s1): 122005
Category: Optical Design and Fabrication
Received: Feb. 15, 2015
Accepted: --
Published Online: Jul. 27, 2015
The Author Email: Zhenyu Liu (lzyth1985@163.com)