Acta Optica Sinica, Volume. 38, Issue 6, 0606003(2018)
Optic Fiber Acceleration Sensors Based on Micro-Electromechanical Systems Technology
Based on the principle of light intensity modulation and micro-electromechanical system (MEMS) technology, we design a kind of optical fiber acceleration sensor. Two silicon rectangular beams are used as the acceleration sensing elements. According to the relation between the shade displacement and the light power difference of the receiving optical fiber, as well as the relation between the deflection of the silicon rectangular beam at center position and the system acceleration, an expression of acceleration with the light power difference is given. The research result shows that, while the deflection of the silicon rectangular beam at center position is 0~10 μm, the corresponding acceleration value is 0~120 m·s -2, and the maximum acceleration detective value can be as much as 12g (g is the acceleration of gravity).
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Ying Zhang, Jun Wu, Jiangnan Wei, Zuwu Jin, Jianghuai Yao. Optic Fiber Acceleration Sensors Based on Micro-Electromechanical Systems Technology[J]. Acta Optica Sinica, 2018, 38(6): 0606003
Category: Fiber Optics and Optical Communications
Received: Nov. 9, 2017
Accepted: --
Published Online: Jul. 9, 2018
The Author Email: Zhang Ying (zhangy@ysu.edu.cn)