By using crossedmolecular beam apparatus, the visible chemiluminescence spectrum were investigated for thereaction F atoms with silane. The emission spectra of HF(3,0)、(4,0)、(5,1)、(6,2)，SiF(A-X) and Si(A-X) transitionwere observed. The relative vibrational state distribution of SiF(A) were obtained by thecomputer simulation. Experimental results indicated that the reaction F with silaneproceeds via a consecutive hydrogen-stripping process.