Acta Optica Sinica, Volume. 10, Issue 3, 234(1990)
Surface temperature of substrate in laser-induced pyrolytic vapor deposition
The distribution of surface temperature and temperature rising of a thin quartz substrate illuminated by a CW CO2 laser was calculated theoretically and measured experimentally. The results were used to analyze the experiments of CW CO2 laser induced pyrolysis of W(CO)6 for depositing large area tungsten films on quartz substrate.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Surface temperature of substrate in laser-induced pyrolytic vapor deposition[J]. Acta Optica Sinica, 1990, 10(3): 234
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