Chinese Journal of Lasers, Volume. 29, Issue 9, 795(2002)
Rigorous Coupled-wave Analysis of a New One-dimensional Deep Sub-wavelength Grating
An one-dimensional deep sub-wavelength grating is studied. A new method is developed for this sub-wavelength gratings fabrication. In this method, the grating periods are composed of multilayer films which are obtained by the method of PECVD. The diffractive efficiency of the grating is computed by using rigorous coupled-wave analysis (RCWA). The property of polarization of the grating is also discussed.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Rigorous Coupled-wave Analysis of a New One-dimensional Deep Sub-wavelength Grating[J]. Chinese Journal of Lasers, 2002, 29(9): 795