Opto-Electronic Engineering, Volume. 43, Issue 1, 18(2016)
Measurement System of Inclination Angle Based on Laser Triangulation
In microscopic measurement, the image inclination can distort the image. The traditional laser triangulation method is improved by using multi-light beam and a laser triangulation with multi-light spots was proposed to measure the inclination angle. Firstly, the laser beams expanded were separated by a double wedge, and formed four beams approximately parallel. Then, the four beams were projected to the plane mirror, and became four spots in CCD after reflected. The multi-light spot optics system could avoid the effects of translation because the distance between the four spots was only related to the inclination angle and not sensitive to the translation. By calculating the distance between four spots, the inclination angle could be compensated, therefore the image distortion was reduced. Experimental results show that the optical device, based on laser triangulation method with multi-light spot, could measure the inclination of microscopic image accurately and fast. It can be applied wildly, such as solid state nuclear track detectors, topography measurement and so on.
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ZHANG Jinfeng, ZHANG Jiye. Measurement System of Inclination Angle Based on Laser Triangulation[J]. Opto-Electronic Engineering, 2016, 43(1): 18
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Received: Apr. 30, 2015
Accepted: --
Published Online: Mar. 22, 2016
The Author Email: Jinfeng ZHANG (zhangjinfeng70@163.co)