Acta Optica Sinica, Volume. 4, Issue 10, 939(1984)
Computation method for analysing ellipsometric equation of optical thin films
A method for determining the refractive index, thickness and extinction coefficient of optical films from measured ellipsometric ψ and Δ is described. This method is founded more convergent and time-saving parameters.
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FAN ZHENGXIU, YANG BENQI. Computation method for analysing ellipsometric equation of optical thin films[J]. Acta Optica Sinica, 1984, 4(10): 939
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