Optics and Precision Engineering, Volume. 20, Issue 1, 45(2012)

Ablation of 0Cr18Ni9 stainless steel films by femtosecond laser

XU Bin1,*... WU Xiao-yu1, LUO Feng1, DU Chen-lin2 and SUN Xiu-quan2 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less

    The 0Cr18Ni9 stainless steel film with a thickness of 20 μm was ablated and cut in a micro-machining. Firstly, the ablation threshold of 0Cr18Ni9 stainless steel film and the beam waist radius of a femtosecond laser were obtained based on the functional relationship between ablation area and laser energy. Then, the metallographic phase and electrical resistivity of the stainless steel film ablated by the femtosecond laser were researched in detail to observe the heat effect caused by the laser. Finally, in order to research the effect of femtosecond laser ablation on the phase composition of the stainless steel film, specimens were tested by X-ray Diffractometry(XRD). Experimental results demonstrate that the waist radius of femtosecond laser is 10.416 μm and the ablation threshold of the stainless steel film with a thickness of 20 μm is 0.455 J/cm2. The metallographic phase of specimens cut by the femtosecond laser is in a recovery process, and its metallographic phase is not changed. The phase composition of stainless steel film is not affected by the femtosecond laser cut, however, the content of phase has been changed.

    Tools

    Get Citation

    Copy Citation Text

    XU Bin, WU Xiao-yu, LUO Feng, DU Chen-lin, SUN Xiu-quan. Ablation of 0Cr18Ni9 stainless steel films by femtosecond laser[J]. Optics and Precision Engineering, 2012, 20(1): 45

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jul. 11, 2011

    Accepted: --

    Published Online: Feb. 14, 2012

    The Author Email: Bin XU (xubin_szu@163.com)

    DOI:10.3788/ope.20122001.0045

    Topics