Journal of Applied Optics, Volume. 42, Issue 5, 796(2021)

Two kinds of making technologies of glass micro-channel arrays and their comparison

Yali WANG1... Kaiyuan CUI1, Shulin LIU2,3,*, Qian ZHANG1, Chonghao LI1 and Xiaofeng LI4 |Show fewer author(s)
Author Affiliations
  • 1Taiyuan Great Wall Low-Light Micro-Channel Electronic Technology Co.,Ltd., Taiyuan 030032, China
  • 2State Key Laboratory of Nuclear Detection and Nuclear Electronics, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
  • 4North Night Vision Technology Co., Ltd., Kunming 650217, China
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    The micro-pore glass array is the base plate of the micro-channel plate made by atomic-layer deposition technology. The distribution uniformity of the micro-pore array and the smoothness of the inner wall of each channel are very important for the subsequent fabrication of qualified micro-channel plates. The hollow-core and solid-core corrosion processes were used respectively to make the aforementioned base plate. The advantages and disadvantages of the two processes were deeply analyzed, and the key technologies of the two processes were expounded. The performance of the micro-channel plate made by atomic-layer deposition technology was compared with that made by conventional technology, and the signal-to-noise ratio of the former was better than that of the latter.

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    Yali WANG, Kaiyuan CUI, Shulin LIU, Qian ZHANG, Chonghao LI, Xiaofeng LI. Two kinds of making technologies of glass micro-channel arrays and their comparison[J]. Journal of Applied Optics, 2021, 42(5): 796

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    Paper Information

    Category: OE SYSTEM AND ENGINEERING

    Received: Feb. 23, 2021

    Accepted: --

    Published Online: Oct. 26, 2021

    The Author Email: LIU Shulin (liusl@ihep.ac.cn)

    DOI:10.5768/JAO202142.0501006

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