An Optical Design of 3-D Diffraction Grating in Soft X-Ray Spectra Based on Scalar Theory

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Acta Optica Sinica, Volume. 18, Issue 1, 99(1998)

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

Author Affiliations

[in Chinese]

show less

Abstract Get PDF(in Chinese)

An asymptotic formalism used in the scalar domain is derived for studying the behavior of three-dimension diffraction gratings used in small groove pitch and near normal incidence for soft X-ray. The theory is applied to study 3-D lamellar gratings and results in a preliminary design.

Keywords

scalar domain soft X-ray diffraction gratings

Tools

Get Citation

Copy Citation Text

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. An Optical Design of 3-D Diffraction Grating in Soft X-Ray Spectra Based on Scalar Theory[J]. Acta Optica Sinica, 1998, 18(1): 99

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Diffraction and Gratings

Received: Dec. 16, 1996

Accepted: --

Published Online: Oct. 18, 2006

The Author Email:

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology